Monolithic Magnetic Sensors Manufactured by Selective Laser Annealing

A world with intelligent electronic devices in every machine and every pocket needs a wide range of sensor technologies. One rapidly growing technology is the sensing of magnetic fields, which can be used in numerous industrial applications such as the angular detection of the precise position of a steering wheel in a car, the detection and control of the rotation in a brushless DC-motor, the measurement of position and interaction of objects for Internet of Things (IoT) applications, the contactless detection of electrical currents, and position detection by e-compass for many different mobile devices including virtual reality (VR) systems.

Very sensitive magnetic sensor chips can be realized by using GMR or TMR (Giant or Tunneling Magnetoresistance) sensors in a Wheatstone bridge circuit. This paper gives an overview of the design, function, operation, and production results for a laser-based annealing technology, called microVEGA xMR, which enables the programming of advanced sensor structures at the wafer-level.

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